Linear Sensors

MLS-105A	MLS-105S

 

■Features
●High accuracy of resolution 0.5μm
●Ultraminiature, lightweightφ5.5 head
●Stable output by high-accuracy shaft
●Good mutual interference of sensors
●Circuit resistant to temperature drift
●Slim control circuit box

■Main applications
●Measurement of distortion of precision moldings
●Measurement of attachment height of electronic parts
●Measurement of outside diameter of shafts
●Measurement of flatness of wafer holders

Item		Specifications		Notes
Measurement range		±2mm	±0.5mm	Operating range: 5mm
Analog voltage output	Output voltage	±4V	±1V	The settings can be changed by gain adjustment.
	Impedance	130Ω
Resolution		0.5μm
Linearity		1.0% F.S.	0.2% F.S.
Measuring force		0.3N		Zero point position
Temperature characteristics		0.02% F.S./ ℃
Power supply voltage		DC.+24V
Consumption current		70mA or less
Operating ambient temperature	Sensor part	-10℃ to +65℃		No freezing
	Control circuit	0℃ to +50℃
Operating ambient temperature		35％ to 85％R.H.		no condensation
Weight	Sensor par	5g		Cables are not included.
	Control circuit	100g

■ Dimensional outline drawing (unit: mm), scale not equal